Large-size substrate
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsDaisuke Kusabiraki, Yukio Shibano
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Abstract
A large-size substrate adapted for light exposure is of a plate shape having a diagonal length or diameter of 500-2,000 mm, a thickness of 1-20 mm, and a peripheral surface with a roughness Ra of 0.05-0.4 μm. The number of particles released from the substrate periphery during cleaning is minimized, leading to an improved yield in the cleaning step. The substrate can be manually handled, achieving an improvement in substrate quality without a need for a handling mechanism.
Claims10
A large-size synthetic quartz substrate adapted for light exposure, the substrate being a rectangular plate shape and having a diagonal length of at least 500 mm, and a uniform thickness of 1 to 20 mm, and the periphery of the substrate being chamfered, wherein
- each of side surfaces of the substrate has rectangular shape,
- each of the side surfaces has a roughness of Ra in the range of 0.05 to 0.4 μm,
- each of the side surfaces has a coefficient of static friction with a handling glove in the presence of water of (substrate weight (kg))/2×(0.02 to 0.03), and
- the large-size synthetic quartz substrate is a photomask substrate.
A method for producing a large-size synthetic quartz substrate adapted for light exposure, comprising the steps of:
- providing a substrate being a rectangular plate shape and having a diagonal length of at least 500 mm, a uniform thickness of 1 to 20 mm, the peripheral of the substrate being chamfered;
- and
- diamond-grinding a side surface of the substrate so that the side surface has a roughness of Ra in the range of 0.05 to 0.4 μm and the side surface of the substrate has a coefficient of static friction with a handling glove in the presence of water of (substrate weight (kg))/2×(0.02 to 0.03).
A method for handling a large-size synthetic quartz substrate adapted for light exposure, comprising the steps of:
- providing a large-size synthetic quartz substrate adapted for light exposure, the substrate being a rectangular plate shape and having a diagonal length of at least 500 mm, a uniform thickness of 1 to 20 mm, and a side surface with a roughness of Ra in the range of 0.05 to 0.4 μm, the peripheral of the substrate being chamfered;
- and
- handling the substrate with a handling glove in the presence of water, the side surface of the substrate having a coefficient of static friction with the handling glove in the presence of water of (substrate weight (kg))/2×(0.02 to 0.03).
Dependencies are inferred from the claim text.