Film forming method, film forming apparatus, method of manufacturing device, and apparatus for manufacturing device
AssigneeSeiko Epson Corporation
InventorMinoru Koyama
Life of this patent
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Abstract
The invention provides a film forming method that improves throughput in a preliminary discharge. The film forming method according to the present invention can include a preliminary discharge step of preliminarily discharging liquid droplets from a head and a liquid droplet discharge step of relatively moving the head and the work to discharge the liquid droplets onto the surface of the work from the head. The preliminary discharge of the liquid droplets is carried out while the head and the work are moved relative to each other.
Claims5
A method of manufacturing a device, in which a work is set so that part of a functional liquid receiver overlaps a peripheral portion of the work in plan view, the method comprising:
- a preliminary discharge step which preliminarily discharges liquid droplets of the functional liquid from nozzles to the functional liquid receiver, wherein the preliminary discharge is carried out in a functional liquid receiving area defined by at least an edge of the work;
- and
- a liquid droplet discharge step which discharges the liquid droplets of the functional liquid onto a surface of the work from the nozzles while moving heads having the nozzles relative the work at a constant speed,
- wherein when the relative movement of the heads and the work is performed, the preliminary discharge step is carried out (i) while the heads or the work is accelerating until reaching the constant speed and (ii) while the heads and the work are relatively moving at the constant speed immediately before the liquid droplet discharge step begins.
Dependencies are inferred from the claim text.