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US 8,012,394 B2Granted
Template pattern density doubling
AssigneeMolecular Imprints, Inc.
InventorSidlgata V. Sreenivasan
Life of this patent
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Abstract
A sub-master template is patterned to provide at least double the density of features of a master template. The sub-master template and master template may employ the use of alignment marks during the patterning process.
Claims10
A method of patterning a multi-layered substrate, the method comprising:
- patterning, using a first template, the multi-layered substrate to provide at least one first protrusion and at least one first recession;
- depositing one or more additional layers on the multi-layered substrate, and,
- patterning, using the first template, the multi-layered substrate to remove portions of the first protrusions, the removal of portions of the first protrusions providing one or more additional protrusions;
- wherein removal of portions of the first protrusions creates a sub-master template having at least double pattern density as compared to the first template.
1 more element
Dependencies are inferred from the claim text.