Metal film protection during printhead fabrication with minimum number of MEMS processing steps

A method of fabricating a printhead having a hydrophobic ink ejection face, the method comprising the steps of:

• (a) providing a partially-fabricated printhead comprising a plurality of nozzle chambers filled with a first sacrificial material and a nozzle plate having a relatively hydrophilic nozzle surface, said nozzle surface at least partially defining the ink ejection face of the printhead;
• (b) depositing a hydrophobic polymeric layer onto the nozzle surface;
• (c) depositing a protective metal film onto at least said hydrophobic polymeric layer;
• (d) depositing a second sacrificial material onto said metal film;
• (e) patterning said sacrificial material to define a plurality of nozzle opening regions;
• (f) defining a plurality of nozzle openings through said metal film, said hydrophobic polymeric layer and said nozzle plate;
• (g) removing all of said first sacrificial material by subjecting said printhead to an oxidizing plasma, wherein said metal film protects said hydrophobic polymeric layer from said oxidizing plasma;
• and
• (h) removing said protective metal film after removal of said first sacrificial material, thereby providing a printhead having a relatively hydrophobic ink ejection face.