Polishing composition
AssigneeKao Corporation
InventorsMasahiko Suzuki, Yuichi Homma, Yukiko Yamawaki
Life of this patent
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Abstract
A polishing composition includes a copolymer and an abrasive. The copolymer has a constitutional unit expressed as the following formula (I) and at least one of constitutional units expressed as the following formulae (II) to (IV). Methoxypolyethylene glycol methacrylate etc. are used as monomers for forming the constitutional unit of the formula (I), stearyl methacrylate etc. are used as monomers for forming the constitutional unit of the formula (II), polypropylene glycol methacrylate etc. are used as monomers for forming the constitutional unit of the formula (III), and styrene etc. are used as monomers for forming the constitutional unit of the formula (IV).
Claims9
A polishing composition comprising a copolymer, water and an abrasive,
- wherein the copolymer has a constitutional unit expressed as the following formula (I) and at least one constitutional unit selected from the group consisting of constitutional units expressed as the following formulas (II) to (III):
- wherein in the formula (I), R1 is a hydrogen atom or a methyl group, R2 is a C1 to C4 alkyl group, AO is a C1 to C8 oxyalkylene group, p is 0 or 1, n is an average number of total AO units added and ranges from 6 to 300, and the proportion of an oxyethylene group in (AO)n is 80 mol % or more;
- in the formula (II), R3 is a hydrogen atom or a methyl group, X is an oxygen atom or an NH group, and R4 is a C4 to C30 alkyl group or a C6 to C30 aryl group;
- and
- in the formula (III), R5 is a hydrogen atom or a methyl group, R6 is a hydrogen atom or a C1 to C3 alkyl group, AO is a C2 to C4 oxyalkylene group, m is an average number of total AO units added and ranges from 3 to 150, and the proportion of an oxypropylene group and an oxybutylene group in (AO)m is 80 mol % or more,
- wherein the content of water in the polishing composition is 75 wt % or more, and the content of the copolymer in the polishing composition is 0.001 to 3 wt %.
Dependencies are inferred from the claim text.