Mold, imprint apparatus, and process for producing structure
AssigneeCanon Kabushiki Kaisha
InventorsNobuhito Suehira, Junichi Seki
Life of this patent
Estimating the term…
Abstract
In order to alleviate or suppress curing of a photocurable resin material in an area in which the curing of the photocurable resin material is not intended, exposure of the photocurable resin material to light is suppressed through a non-pattern portion at which a light-blocking member is provided by means of a mold having an imprint pattern portion and the non-pattern portion or is suppressed by disposing a light-blocking member so as not to irradiate the photocurable resin material with light not via the mold.
Claims2
An imprint apparatus for processing a photocurable member to be processed by irradiating the photocurable member to be processed, through a mold having an imprint pattern, with light for curing the member to be processed in a state in which the mold is brought into contact with the member to be processed, said apparatus comprising:
- a light source for generating the light;
- a mold holding portion for holding a back surface of the mold opposite from a processing surface of the mold;
- and
- a body tube, provided between said light source and said mold holding portion, having a lateral side inside an outer edge of the member to be processed with respect to a horizontal direction,
- wherein said apparatus further comprises a light-blocking member for decreasing an amount of light with which the member to be processed is irradiated from said light source not through the mold, and
- wherein said light-blocking member is provided on a lateral side of said mold holding portion, on a surface of said mold holding portion opposing said photocurable member, and on the lateral side of said body tube.
Dependencies are inferred from the claim text.