Imprint lithography
AssigneeASML Netherlands B.V.
InventorKlaus Simon
Life of this patent
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Abstract
A lithographic apparatus is disclosed that has a first substrate table arranged to hold a substrate and a second substrate table arranged to hold a substrate, an imprint template holder arranged to hold an imprint template, and an imprintable medium dispenser, wherein the first substrate table is moveable between a first position located at or adjacent to the imprintable medium dispenser, and a second position located at or adjacent to the imprint template holder, and the second substrate table is moveable between the first and second positions, such that the first and second substrate tables swap positions.
Claims9
An imprint lithography apparatus, comprising:
- a first substrate table arranged to hold a first substrate;
- a second substrate table arranged to hold a second substrate;
- an imprint template holder arranged to hold an imprint template;
- an imprintable medium dispenser;
- and
- a first alignment system located at or adjacent the imprintable medium dispenser and a second alignment system located at or adjacent to the imprint template holder, each of the first and second alignment systems configured to determine the location of one or more alignment marks on a substrate or one or more alignment marks on a substrate table,
- wherein the first substrate table is moveable between a first position located at or adjacent to the imprintable medium dispenser, and a second position located at or adjacent to the imprint template holder, and the second substrate table is moveable between the first and second positions, such that the first and second substrate tables swap positions,
- wherein the first and second substrate tables are arranged such that the imprintable medium dispenser provides imprintable medium onto the first substrate for at least a same time instance when the imprint template imprints a pattern onto the second substrate, and
- wherein the imprint template holder and the imprintable medium dispenser are arranged such that the imprint template is separated from the imprintable medium dispenser by a distance at least equal to a width of the first substrate or the second substrate.
An imprint lithography apparatus comprising:
- a first substrate table arranged to hold a first substrate;
- a second substrate table arranged to hold a second substrate;
- an imprint template;
- a dispenser configured to dispense imprintable medium;
- and
- a first alignment system located at or adjacent the imprintable medium dispenser and a second alignment system located at or adjacent to the imprint template, each of the first and second alignment systems configured to determine the location of one or more alignment marks on a substrate or one or more alignment marks on a substrate table,
- wherein the first substrate table is moveable between a first position located at or adjacent to the imprintable medium dispenser and a second position located at or adjacent to the imprint template, and the second substrate table is moveable between the first and second positions, such that the first and second substrate tables swap positions,
- wherein the first and second substrate tables are arranged such that the imprintable medium dispenser provides imprintable medium onto the first substrate for at least a same time instance when the imprint template imprints a pattern onto the second substrate, and
- wherein the imprint template and the imprintable medium dispenser are arranged such that the imprint template is separated from the imprintable medium dispenser by a distance at least equal to a width of the first substrate or the second substrate.
Dependencies are inferred from the claim text.