Coating for gas bearing
AssigneeOerliken Leybold Vacuum GmbH
InventorsRoland Blumenthal, Michael Froitzheim
Life of this patent
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Abstract
The invention relates to a vacuum pump in which the gas bearing is coated with a hard layer, and to a process for preparing such gas bearing of a vacuum pump.
Claims10
A vacuum pump (1) free of lubricant and comprising an intake opening (2), an outlet opening (3), a shaft (4) carrying a gas bearing rotor (16) supported in gas bearings (5), characterized in that at least the gas bearing surface (9) facing towards the shaft (4) and/or facing towards the gas bearing rotor (16) has a hard layer (10) having a layer thickness within a range of from 0.5 to 30 μm and made of a material having a microhardness of at least 1000 HK at a measuring force of 0.01 N.
Dependencies are inferred from the claim text.