Method and system for calibrating an X-ray photoelectron spectroscopy measurement

A method for calibrating an X-ray photoelectron spectroscopy (XPS) measurement, comprising:

• generating an X-ray beam from an anode;
• generating a monochromatized X-ray beam from said X-ray beam;
• bombarding a sample with said monochromatized X-ray beam;
• generating an XPS signal from said sample;
• and
• normalizing said XPS signal with a flux of said monochromatized X-ray beam according to the following equation:
• XPScalibrated=XPSmeasured×(Fluxcalibrated/Fluxmeasured or estimated).

A system for calibrating an X-ray photoelectron spectroscopy (XPS) measurement, comprising:

• an X-ray source for generating an X-ray beam;
• a sample holder for positioning a sample in a pathway of said X-ray beam;
• a detector for collecting an XPS signal generated by bombarding said sample with said X-ray beam;
• a flux detector for determining a flux of said X-ray beam;
• and
• a computing system configured to normalize said XPS signal with said flux of said X-ray beam according to the following equation:
• XPScalibrated=XPSmeasured×(Fluxcalibrated/Fluxmeasured or estimated).

A system for calibrating an X-ray photoelectron spectroscopy (XPS) measurement, comprising:

• an electron beam source for generating an electron beam;
• an anode for generating an X-ray beam when said anode is bombarded by said electron beam;
• a monochromator for generating a monochromatized X-ray beam from said X-ray beam;
• a sample holder for positioning a sample in a pathway of said monochromatized X-ray beam;
• a detector for collecting an XPS signal generated by bombarding said sample with said monochromatized X-ray beam;
• a flux detector for determining a flux of said monochromatized X-ray beam;
• and
• a computing system configured to normalize said XPS signal with said flux of said monochromatized X-ray beam according to the following equation:
• XPScalibrated=XPSmeasured×(Fluxcalibrated/Fluxmeasured or estimated).