Liquid jet head and a liquid jet apparatus
AssigneeSeiko Epson Corporation
InventorAkira Matsuzawa
Life of this patent
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Abstract
A plurality of pressure generating chambers being formed of a silicon substrate, in which a crystal face orientation of a surface is a (110) plane, and each pressure generating chambers communicating with nozzles in parallel. Piezoelectric elements are formed on one surface of the substrate with a vibration plate interposed therebetween and include a lower electrode film, a piezoelectric layer, and an upper electrode film. In each of the pressure generating chambers, an end surface is formed of a first (111) plane perpendicular to the (110) plane and an end surface in a longitudinal direction is formed of a second (111) plane inclined by a predetermined angle with respect to the first (111) plane.
Claims4
A liquid jet head comprising:
- a passage forming silicon substrate having a pressure generating chamber with a crystal face orientation of a surface being a (110) plane
- wherein the pressure generating chamber communicates with a liquid droplet ejecting nozzle;
- wherein the pressure generating chamber has a longitudinal direction and a width direction;
- and
- wherein the pressure generating chamber has a first (111) plane along the width direction and a second (111) plane along the longitudinal direction;
- an elastic film disposed above the pressure generating chamber;
- and
- a piezoelectric element having a lower electrode, a piezoelectric layer, and an upper electrode disposed above the elastic film;
- wherein both ends of the lower electrode and both ends of the upper electrode in the longitudinal direction are located in a region corresponding to the pressure generating chamber;
- and
- wherein one edge of the lower electrode and one edge of the upper electrode in the width direction are parallel to the first (111) plane of the pressure generating chamber.
Dependencies are inferred from the claim text.