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US 8,011,646 B2Granted
Structure of vacuum chuck for absorbing substrate
AssigneeLG Display Co., Ltd.
InventorMoon-Ho Choi
Life of this patent
Estimating the term…
Abstract
A structure of a vacuum chuck for absorbing a substrate and usable in the fabrication of a liquid crystal display device is provided. This structure includes an absorbing plate absorbing a surface of the substrate, and a plurality of vacuum lines in an oblique line shape on the absorbing plate.
Claims12
A vacuum chuck for absorbing a substrate, comprising:
- an absorbing plate to absorb the substrate, the absorbing plate having a first region for absorbing the substrate and a second region formed in an outer portion of the first region;
- and
- a plurality of vacuum lines formed on the surface of the absorbing plate, each vacuum line being linearly formed in a line shape extended to one side from the other side of the first region of the surface of the absorbing plate corresponding to the substrate, the vacuum lines being contacted with the surface of the substrate to absorb the substrate,
- wherein the plurality of vacuum lines are obliquely extended to the sides of the absorbing plate and a distance between the vacuum lines is uniform in the whole area of the first region of the absorbing plate,
- wherein all of the vacuum lines are extended in the same direction on the surface of the absorbing plate.
2 more elements
An apparatus for absorbing a substrate having a plurality of gate lines and data lines, the apparatus comprising:
- an absorbing plate to absorb the substrate, the absorbing plate having a first region for absorbing the substrate and a second region formed in an outer portion of the first region;
- and
- a plurality of vacuum lines formed on the surface of the absorbing plate, the vacuum line being continuously extended in a direction oblique to the extension direction of the data line so that the adhesion force caused by the vacuum lines is applied to the portion of the substrate formed in the direction oblique to the extension direction of the data line of the substrate.
Dependencies are inferred from the claim text.