Method for oxidizing a layer, and associated holding devices for a substrate
AssigneeInfineon Technologies AG
InventorsHin-Yiu Chung, Thomas Gutt
Life of this patent
Estimating the term…
Abstract
A holding device is presented in which a layer which is to be oxidized is processed, in a single-substrate process. The process temperature during the processing is recorded directly at the substrate or at a holding device for the substrate. The process includes introducing a substrate, which bears a layer to be oxidized uncovered in an edge region in a layer stack, into a heating device, passing an oxidation gas onto the substrate, heating the substrate to a process temperature, which is recorded during the processing via a temperature of the holding device which holds the substrate, and controlling the substrate temperature to a desired temperature or temperature curve during the processing.
Claims7
A holding device for containing a layer to be oxidized, comprising:
- a flat base body comprising graphite;
- a graphite cover;
- a first recess extending from a top surface of the holding device into the holding device, the first recess defined by a first stop face that extends from the top surface of the holding device and a first bearing surface on which the cover rests, the first bearing surface extending transversely with respect to the first stop face;
- a second recess extending below the first recess into the holding device and which is matched to a substrate;
- an outer coating;
- and
- a third recess extending below the first recess into the holding device, wherein the third recess runs in a circumferential direction around the second recess and is matched to an insert ring.
A holding device for containing a layer to be oxidized, comprising:
- a flat base body comprising graphite;
- a graphite cover;
- a first recess extending from a top surface of the holding device into the holding device, the first recess defined by a first stop face that extends from the top surface of the holding device and a first bearing surface on which the cover rests, the first bearing surface extending transversely with respect to the first stop face;
- a second recess extending below the first recess into the holding device and which is matched to a substrate, wherein the second recess comprises a diameter to accommodate an insert ring and the substrate, the insert ring having an inner diameter than is greater than a diameter of the substrate;
- and
- an outer coating.
Dependencies are inferred from the claim text.