Advanced mixing system for integrated tool having site-isolated reactors
AssigneeIntermolecular, Inc.
InventorsKurt H. Weiner, Tony P. Chiang, Aaron Francis, John Schmidt
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Abstract
An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site-isolated reactors of the combinatorial processing module.
Claims29
An integrated processing tool comprising a site-isolated reactor (SIR), wherein the SIR includes:
- a set of first manifolds, wherein each of the first manifolds is coupled to a plurality of chemicals in a liquid state;
- a plurality of mixing vessels, wherein each mixing vessel is coupled to an output of each of the first manifolds, and wherein each of the mixing vessels includes a stirring element;
- a set of second manifolds, wherein each of the second manifolds is coupled to an output of multiple mixing vessels;
- and
- a plurality of flow cells, wherein each flow cell is coupled to an output of at least one of the second manifolds.
Dependencies are inferred from the claim text.