Substrate proximity drying using in-situ local heating of substrate
AssigneeLam Research Corporation
InventorsKatrina Mikhaylichenko, Kenneth C. Dodge, Mikhail Korolik, Michael Ravkin, John M. de Larios, Fritz C. Redeker
Life of this patent
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Abstract
A method is provided for removing a residual fluid remaining at a point of contact between a substrate support member and a back surface of a substrate being prepared by a proximity head. According to the method, the proximity head is applied onto the back surface of the substrate and the substrate support member being held by a carrier. The substrate support member is heated after the substrate support member passes the proximity head. The heating of the substrate support member is discontinued once the residual fluid has substantially evaporated.
Claims13
A method for removing a residual fluid remaining at a point of contact between a substrate support member and a back surface of a substrate being prepared by a proximity head, the method comprising:
- supporting the substrate from only an edge of the substrate, the supporting including placing a portion of the edge on the substrate support member;
- applying the proximity head onto the back surface of the substrate and the substrate support member being held by a carrier having a front side, a back side, and an opening defining an inner rim;
- initiating heating of the substrate support member after the substrate support member passes the proximity head;
- and
- discontinuing the heating of the substrate support member once the residual fluid has substantially evaporated;
- wherein the carrier includes two or more support members to enable holding of the substrate.
A method for removing residual fluid from a substrate during fluid preparation, comprising:
- supporting the substrate from a support member connected to an inner rim defined by an opening in a carrier, the carrier having a front side and a back side, the substrate being supported from an outer edge of the substrate at a point so as to expose both a first and second surface side of the substrate from the front side and back side of the carrier;
- applying a current across a resistive material between a first electrode and a second electrode, the first electrode and second electrode being coupled to the resistive material, the support member including the resistive material so as to enable current heating of the support member;
- wherein the carrier includes two or more of the support members to enable holding of the substrate.
A method for preparing a substrate, comprising:
- holding a substrate to be prepared in a carrier, a leading support member, a second support member, and a trailing support member being secured to the carrier, the leading, second, and trailing support members having a corresponding first end and a corresponding second end, the first ends of the leading, second, and trailing support members being in contact with a back surface of the substrate at respective points of contact and the second ends of the leading, second, and trailing support members being secured to the carrier, wherein the leading, second, and trailing support members are configured to successively pass by leading and trailing proximity heads, and a leading pair of electrical contacts, a second pair of electrical contacts, and a trailing pair of electrical contacts,
- preparing the back surface of the substrate as the carrier passes by the leading and trailing proximity heads, successively;
- wherein as the second ends corresponding to the leading, second, and trailing support members exit the trailing proximity head, successively, the leading, second, and trailing support members are resistively heated consecutively until residual fluids defined at the corresponding points of contact between the first ends of the leading, second, and trailing support members and the substrate back surface are evaporated.
Dependencies are inferred from the claim text.