Fabrication method of a nanotube-based electric connection having air gaps
AssigneeCommissariat a l'Energie Atomique
InventorsFrederic-Xavier Gaillard, Jean-Christophe Coiffic
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Abstract
A target layer with holes is formed on a bottom conducting layer. Nanotubes are formed in the holes from the bottom conducting layer. A flat insulating layer is then deposited on the target layer, the nanotubes passing through the insulating layer. Air gaps are then formed by selective decomposition of the target layer. The decomposition agent and/or decomposition by-products use the walls and the central holes of the nanotubes to pass between the target layer and the outside. After decomposition, the top conducting layer is formed on the insulating layer. The nanotubes then electrically connect the conducting layers.
Claims10
A fabrication method of a nanotube-based electric connection between first conducting layer and a second conducting layer separated by a target layer, the method successively comprising:
- forming the target layer on the first conducting layer,
- forming in the target layer one hole comprising a bottom made by the first conducting layer,
- growing nanotubes in the hole so as to be in electrical contact with the first conducting layer, the nanotubes comprising porous walls,
- depositing a flat insulating layer through which the nanotubes pass,
- decomposing selectively the target layer, made of a decomposable material, the porous walls forming passages between the target layer and an inner part of the nanotubes for a decomposition agent and/or decomposition by-products formed during the selective decomposition, and
- forming the second conducting layer so as to be electrically connected to the first conducting layer by the nanotubes.
Dependencies are inferred from the claim text.