Method of repairing segmented contactor
AssigneeFormFactor, Inc.
InventorsMohammad Eslamy, David V. Pedersen, Harry D. Cobb
Life of this patent
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Abstract
A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor units may include leads extending laterally for connection to an external instrument such as a burn-in board. The contactor units include conductive areas such as pads that are placed into contact with conductive terminals on devices under test.
Claims8
A method of repairing a segmented contactor assembly usable to test integrated circuits, wherein said segmented contactor assembly comprises contactor units coupled in particular positions to a backing substrate, each said contactor unit comprising electrically conductive resilient contact elements having contact tips disposed in a sub-pattern, wherein while said contactor units are in said particular positions, said contact tips of said contactor units are disposed in an overall pattern that corresponds to terminals of said integrated circuits, said method comprising:
- removing a first one of said contactor units from said backing substrate;
- testing electrically at least one replacement contactor unit comprising electrically conductive resilient contact elements with contact tips disposed in a sub-pattern that corresponds to said sub-pattern of said contact tips of said first one of said contactor units to obtain a tested replacement contactor;
- and
- coupling said tested replacement contactor unit to said backing substrate in said particular position of said first one of said contactor units such that said contact tips of said tested replacement contactor unit replaces said contact tips of said first one of said contactor units in said overall pattern.
Dependencies are inferred from the claim text.