Semiconductor wafer analysis system

#This application claims priority from Korean Patent Application No. 10-2005-0133922 filed on Dec. 29, 2005 in the Korean Intellectual Property Office, the disclosure of which is incorporated herein by reference in its entirety.

#1. Field of the Invention

#Embodiments of the present invention, disclosed herein, relate to a semiconductor wafer analysis system and a method of controlling the system, and more particularly, to a semiconductor wafer analysis system for analyzing and examining specific data of wafers.

#The above and other features and advantages of the present invention will become more apparent by describing in detail preferred embodiments thereof with reference to the attached drawings, in which:

#FIG. 1 is a block diagram of a semiconductor wafer analysis control system according to an embodiment of the invention;

#FIG. 2 is a detailed block diagram of a semiconductor wafer analysis system shown in FIG. 1;

#Advantages and features of the present invention and methods of accomplishing the same may be understood more readily by reference to the following detailed description of preferred embodiments and the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete and will fully convey the concept of the invention to those skilled in the art, and the present invention will only be defined by the appended claims. Like reference numerals refer to like elements throughout the specification.

#A semiconductor wafer analysis system according to an embodiment of the invention divides each wafer map into a plurality of defect analysis regions, generates feature vectors, and statistically analyzes the feature vectors so as to determine defective facilities.

#FIG. 1 is a block diagram of a semiconductor wafer analysis control system according to an embodiment.