US 8,009,345 B2Granted

Crystallization apparatus, crystallization method, device, and light modulation element

AssigneeAdvanced LCD Technologies Development Center Co., Ltd.

InventorsYukio Taniguchi, Masakiyo Matsumura, Kazufumi Azuma, Tomoya Kato, Takahiko Endo

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Abstract

A crystallization apparatus includes a light modulation element, and an image forming optical system that forms a light intensity distribution set based on light transmitted through the light modulation element on an irradiation surface. The crystallization apparatus irradiates a non-single crystal semiconductor film with light having the light intensity distribution to generate a crystallized semiconductor film. A curvature radius of at least one isointensity line of a light intensity substantially varies along the isointensity line in the light intensity distribution on the irradiation surface, and a curvature radius of at least a part of the isointensity line has a minimum value of 0.3 μm or below.

Claims3

Dependent claims

A light modulation element which forms a predetermined light intensity distribution based on incident light,

wherein a basic pattern of the light modulation element has a first strip-like region and a second strip-like region adjacent to the first strip-like region,
a ratio of a first region having a first phase value and a second region having a second phase value varies in a first direction along a boundary line between the first strip-like region and the second strip-like region and a second direction perpendicular to the boundary line in accordance with each unit region in the first strip-like region, and
a ratio of the first region having the first phase value and a third region having a third phase value varies in the first direction and the second direction in accordance with each unit region in the second strip-like region.

Dependencies are inferred from the claim text.