Method for beam calibration and usage of a calibration body

Method of calibration of the beam position, in at least a first direction, of a corpuscular beam of a corpuscular beam device in a plane section, comprising:

• providing a calibration body having structures, wherein the structures have a structure period PS in the at least first direction within the plane section, and a position L intended for the measurement exists within each structure;
• generating at least one detection signal, at respective structures in the section of the calibration body comprising:
• deflecting the corpuscular beam with deflectors onto beam target positions L1 having a beam target period P1, in the at least first direction, which is larger than half of the structure period PS of the structures;
• wherein the beam target positions having the beam target period are the desired measurement points;
• wherein a basic calibration D1 is used for control of the deflectors;
• and
• wherein beam target deflections deviate, in the at least first direction, either in the beam target period P1 from the structure period PS and/or in the beam target position L1 from the positions L;
• detection of signals, which depend on the measurement location within each structure of the calibration body;
• and
• calculating a new calibration based on the generated detection signals.