Projection optical system, exposure apparatus, exposure system, and exposure method

An exposure apparatus for performing exposure of a predetermined pattern on a photosensitive substrate, comprising:

• an objective optical system that forms an image of the predetermined pattern in an exposure region on the photosensitive substrate;
• and
• a transformer that transforms the image formed in the exposure region,
• wherein the transformer comprises:
• an image transformer that transforms the image of the predetermined pattern formed on the photosensitive substrate;
• and
• a rotator that achieves a relative rotation between the image of the predetermined pattern transformed by the image transforming means, and the photosensitive substrate,
• wherein the image transformer comprises a first wedge prism each of an entrance surface and an exit surface of which has a plane and in which a predetermined first wedge angle is made between the plane of the entrance surface and the plane of the exit surface, the first wedge prism being disposed within a projection optical system;
• when a coordinate system is defined so that a Z-axis direction is set along a direction of a normal to a first plane where the predetermined pattern is located, an X-axis direction along a direction of an intersecting line between the plane of the entrance surface and the plane of the exit surface, and a Y-axis direction along a direction perpendicular to the Z-axis direction and the X-axis direction, the first wedge prism is arranged rotatably substantially around the Y-axis direction, and
• the first wedge prism transforms the image formed in the exposure region from one of (1) a rectangular shape into a parallelogram shape and (2) a parallelogram shape into a rectangular shape.

An assembly for use with a projection optical system that forms an image of a first plane on a second plane, comprising:

• a first wedge prism each of an entrance surface and an exit surface of which has a plane and in which a predetermined first wedge angle is made between the plane of the entrance surface and the plane of the exit surface,
• wherein the first wedge prism is disposed within the projection optical system,
• when a coordinate system is defined so that a Z-axis direction is set along a direction of a normal to the first plane, an X-axis direction along a direction of an intersecting line between the plane of the entrance surface and the plane of the exit surface, and a Y-axis direction along a direction perpendicular to the Z-axis direction and the X-axis direction, the first wedge prism is arranged rotatably around a rotation axis in the X-Z plane, and
• the first wedge prism transforms the image of the first plane imaged on the second plane from one of (1) a rectangular shape into a parallelogram shape and (2) a parallelogram shape into a rectangular shape.