Lamb wave type elastic wave device
AssigneeUniversity of Yamanashi
InventorYasuhiko Nakagawa
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Abstract
Provided is a device of a high-frequency resonator using Lamb wave type elastic wave having excellent frequency temperature characteristics, the device having a significantly small frequency change, and including an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate. The cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfy any one of following expressions (Expressions 1 to 3): λ=90°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10° (Expression 1) λ=210°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10° (Expression 2) λ=330°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°. (Expression 3)
Claims9
A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying any one of following expressions (Expressions 1 to 3)
- Λ=88° to 92°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10° (Expression 1)
- λ=208° to 212°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10° (Expression 2)
- λ=328° to 332°, μ=17° to 21° or μ=159° to 163°, θ=0° to 10°. (Expression 3)
A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying any one of following expressions (Expressions 4 to 6)
- λ=88° to 92°, μ=13° to 16° or μ=164° to 167°, θ=0° to 10° (Expression 4)
- λ=208° to 212°, μ=13° to 16° or μ=164° to 167°, θ=0° to 10° (Expression 5)
- λ=328° to 332°, μ=13° to 16° or μ=164° to 167°, θ=0° to 10°. (Expression 6)
A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying any one of following expressions (Expressions 7 to 9)
- λ=20° to 25°, μ=120° to 130°, θ=40° to 45° (Expression 7)
- λ=140° to 145°, μ=120° to 130°, θ=40° to 45° (Expression 8)
- λ=260° to 265°, μ=120° to 130°, θ=40° to 45°. (Expression 9)
A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying a following expression (Expression 10), and a ratio H/Λ of a thickness H of the quartz substrate to a periodic length Λ of the interdigital transducer is 0.9
- λ=90°, μ=18.997° or μ=180°−18.997°, θ=7.5°. (Expression 10)
A Lamb wave type elastic wave device having an interdigital transducer for generating at least one Lamb wave type elastic wave, or the interdigital transducer and a reflector, arranged on a quartz substrate, a cut angle of the quartz substrate and a propagation direction of the Lamb wave type elastic wave expressed in Euler angles (λ, μ, θ) satisfying a following expression (Expression 11), and a ratio H/Λ of a thickness H of the quartz substrate to a periodic length Λ of the interdigital transducer is 0.9
- λ=90°, μ=14.715° or μ=180°−14.715°, θ=0°. (Expression 11)
Dependencies are inferred from the claim text.