Surface acoustic wave device and method of manufacturing the same
AssigneeKYOCERA Corporation
InventorsToru Fukano, Atsuomi Fukuura
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AssigneeKYOCERA Corporation
InventorsToru Fukano, Atsuomi Fukuura
Estimating the term…
A surface acoustic wave device excellent in reliability and a method of manufacturing the same are provided. The surface acoustic wave device comprises a piezoelectric substrate (1) for propagating an surface acoustic wave thereon, an IDT (2) formed on a first main surface of the piezoelectric substrate (1) and a protective cover (6) formed of a photocurable material and covering a formation region of the IDT (2), thereby forming a hollow containing space (7) together with the first main surface, which has an acid generating portion containing an acid-generating agent in a region at its lower end. The surface acoustic wave device further comprises a connecting line (3) formed on the first main surface and connected to the IDT (2), being drawn out from the inside of the protective cover (6) to the outside thereof to have an end portion at the outside of the protective cover (6), and a bonding film (8) formed of an insulating material and so formed as to be interposed at least between the acid generating portion of the protective cover (6) and the connecting line (3).
A surface acoustic wave device comprising:
A method of manufacturing a surface acoustic wave device, comprising:
Dependencies are inferred from the claim text.