Back to results
US 8,008,632 B2Granted
Two-zone ion beam carbon deposition
AssigneeSeagate Technology LLC
InventorsPaul Stephen Mcleod, Kueir-Weei Chour
Life of this patent
Estimating the term…
Abstract
The invention relates an ion source for ion beam deposition comprising multiple anodes, wherein the ion source deposits multiple zones of a source material and thicknesses of at least two of the multiple zones are different.
Claims15
An ion source for ion beam deposition comprising:
- a first cylindrical anode;
- a second cylindrical anode, the first cylindrical anode being concentric with the second cylindrical anode;
- an electron source positioned within at least one of the first cylindrical anode and the second cylindrical anode;
- a first voltage source input configured to apply a first voltage from a first voltage source to the first cylindrical anode to deposit a first thickness of a source material in a first zone on a substrate;
- and
- a second voltage source input configured to apply a second voltage from a second voltage source that is separate from the first voltage source to the second cylindrical anode to deposit a second thickness of the source material in a second zone on the substrate,
- wherein the first voltage is different than the second voltage and the first thickness is different than the second thickness.
4 more elements
A method of depositing multiple concentric zones of a source material on a substrate, wherein respective thicknesses of the concentric zones are different, the method comprising:
- placing an ion source in front of the substrate, the ion source comprising a first cylindrical anode, a second cylindrical anode, and an electron source, the first cylindrical anode being concentric with the second cylindrical anode, wherein the electron source is positioned within at least one of the first cylindrical anode and a second cylindrical anode;
- applying a first voltage from a first voltage source to the first cylindrical anode to deposit a first thickness of the source material in a first zone on the substrate;
- and
- applying a second voltage from a second voltage source to the second cylindrical anode to deposit a second thickness of the source material in a second zone on the substrate, the second voltage source being separate from the first voltage source.
1 more element
A method of manufacturing a magnetic recording medium comprising:
- placing an ion source in front of a substrate, the ion source comprising a first cylindrical anode, a second cylindrical anode, and an electron source, the first cylindrical anode being concentric with the second cylindrical anode, wherein the electron source is positioned within at least one of the first cylindrical anode and a second cylindrical anode;
- depositing at least one magnetic layer on the substrate;
- applying a first voltage from a first voltage source to the first cylindrical anode to deposit a first thickness of a carbon-containing layer in a first zone on the substrate;
- and
- applying a second voltage from a second voltage source to the second cylindrical anode to deposit a second thickness of the carbon-containing layer in a second zone on the substrate, the second voltage source being separate from the first voltage source.
2 more elements
Dependencies are inferred from the claim text.