Charged particle beam device and method for inspecting specimen
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorsPavel Adamec, Shemesh Dror
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Abstract
A charged particle beam device is provided. The device includes a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis, a specimen stage defining a specimen location area, a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on the specimen, wherein the deflection unit is movable with respect to the optical axis.
Claims3
Charged particle beam device comprising:
- a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis;
- a specimen stage defining a specimen location area;
- and
- a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on a specimen, wherein the deflection unit is movable with respect to the optical axis and is positioned on the specimen stage.
Charged particle beam device comprising:
- a primary objective lens for focusing a primary charged particle beam, the primary objective lens defining an optical axis;
- a specimen stage defining a specimen location area, wherein the specimen stage comprises an X direction stage for movement in X-direction, a Y direction stage for movement in Y-direction, and a Z direction stage for movement in Z-direction;
- and
- a deflection unit for deflecting the primary charged particle beam between the primary objective lens and the specimen location area, towards a beam path for impingement on a specimen, herein the deflection unit is movable with respect to the optical axis and is adapted to follow movements of the X direction stage and the Y direction stage.
Dependencies are inferred from the claim text.