Electrostatic chuck heater

An electrostatic chuck heater, comprising:

• a base composed of an alumina sintered body;
• an electrostatic electrode which is embedded in upper part of the base and contains a conductive material;
• and
• a heater electrode which is embedded in lower part of the base and contains a conductive material;
• wherein
• the base includes a dielectric layer between the electrostatic electrode and an upper surface of the base, a substrate layer between the electrostatic electrode and heater electrode, and a supporting layer between the heater electrode and a lower surface of the base;
• wherein a diffusion area ratio of the conductive material of the electrostatic electrode present in the dielectric layer near the electrostatic electrode is defined as a ratio of black parts, which define a cross-section of the conductive material of the electrostatic electrode in the dielectric layer, to a cross-sectional region defined as 850 μm along a surface of the electrostatic electrode and 300 μm along a depth direction of the dielectric layer in binarized image data, obtained by binarizing an electron micrograph taken at 150× magnification of a region proximate a boundary between the dielectric layer and the substrate layer;
• and
• wherein the diffusion area ratio of the conductive material of the electrostatic electrode present in the dielectric layer near the electrostatic electrode is set not more than 0.25% by applying a conductive paste containing a binder to an upper surface of the alumina sintered body defining the substrate layer to print the electrostatic electrode, applying a conductive paste containing a binder to a lower surface of the alumina sintered body to print the heater electrode, calcining the alumina sintered body, and pressing alumina powder and the alumina sintered body with the alumina powder placed above the electrostatic electrode and below the heater electrode.