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US 8,008,201 B2Granted
Aqueous cerium oxide dispersion
AssigneeEvonik Degussa GmbH
InventorsMichael Kröll, Stefan Heberer, Stipan Katusic, Michael Krämer, Wolfgang Lortz
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Abstract
Aqueous cerium oxide dispersion Aqueous cerium oxide dispersion, containing 5 to 60% by weight cerium oxide. It can be used to polish SiO2 in the semiconductor industry.
Claims5
An aqueous cerium oxide dispersion, consisting of 5 to 60% by weight cerium oxide, including aggregate particles with a particle size distribution of
- d50<120 nm
- d99<200 nm
- in water, which has a pH of 3 to 8 and a viscosity of less than 30 mPas.
Dependencies are inferred from the claim text.