Method for manufacturing semiconductor device
AssigneeFujitsu Semiconductor Limited
InventorYoshihisa Iba
Life of this patent
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Abstract
A method for manufacturing a semiconductor device includes forming in order a barrier film, an insulating film, a first mask, and a second mask having etching properties different from those of the first mask on a substrate, removing the insulating film, the first mask, and the second mask to form a via hole in the insulating film, removing the second mask in a wiring trench forming region including the via hole, and etching the first mask using the second mask as a mask to remove the first mask in the wiring trench forming region. Removing the first mask in the wiring trench forming region includes etching the first mask and etching the barrier film at the bottom of the via hole to partially remove the barrier film at the bottom of the via hole.
Claims12
A method for manufacturing a semiconductor device comprising:
- forming in order a barrier film (40), an insulating film (42), a first mask (44), and a second mask (46) having etching properties different from those of the first mask above a substrate;
- removing the insulating film, the first mask, and the second mask to form a via hole (52) reaching the barrier film;
- after the forming of the via hole, removing the second mask in a wiring trench forming region including the via hole;
- etching the first mask using the second mask as a mask to remove the first mask in the wiring trench forming region, while a part of the barrier film at the bottom of the via hole is etched and another part of the barrier film at the bottom of the via hole is remained, and
- after the removing of the first mask in the wiring trench forming region, etching the insulating film using the first mask as a mask to form a wiring trench (60) in the insulating film while removing the barrier film remained at the bottom of the via hole.
Dependencies are inferred from the claim text.