Method for manufacturing semiconductor device

A method for manufacturing a semiconductor device including a semiconductor substrate having a first region that includes a plurality of active elements and a second region that excluding any active element, at least one electrode pad electrically connected to any of said active elements, and at least one Through Silicon VIA electrode electrically connected to said electrode pad by way of said second region, the method comprising the steps of:

• forming an insulator layer on a part of said semiconductor substrate to form an isolation layer that insulates and separates said active elements from each other in said first region, and to form at least one dummy portion which is composed of a base material of said semiconductor substrate exposed in said insulator layer in said second region;
• forming said active elements in said first region;
• forming a silicide layer on said first and second regions excluding at least a portion in which said Through Silicon VIA electrode should be formed;
• forming at least one Through Silicon VIA hole extending from a reverse surface side of said semiconductor substrate to said electrode pad by way of said second region;
• and
• forming a conductive film on a inner wall of said Through Silicon VIA hole to form said Through Silicon VIA electrode electrically connected to said electrode pad.