Light emitting device having light extraction structure and method for manufacturing the same

A method for manufacturing a light emitting device, comprising:

• growing a semiconductor structure having multi-layers over a substrate;
• forming a first electrode over a first surface of the semiconductor structure;
• providing a support layer on the first electrode;
• removing the substrate from a second surface of the semiconductor structure;
• forming a dielectric layer over the second surface of the semiconductor structure;
• forming a plurality of holes in the dielectric layer;
• forming a plurality of grooves in the semiconductor structure by using the dielectric layer as a mask, the grooves forming a rough surface through which light is extracted or a photonic crystal structure;
• removing the dielectric layer;
• and
• forming a second electrode over the second surface of the semiconductor structure.