Method and solution for forming a patterned ferroelectric layer on a substrate
AssigneeThe United States of America as represented by the Secretary of the Navy
InventorThomas Kirk Dougherty
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Abstract
A method for forming a patterned ferroelectric layer, having ferroelectric electronic properties, on a substrate. A composite layer, made of ferroelectric layer producing metal acrylate compounds, a photoinitiator compound and an acrylate crosslinking compound is formed on the substrate. A photomask is formed on the composite layer. Unmasked areas of the composite layer are irradiated with ultraviolet light. A solvent removes non-irradiated areas of the composite layer from the substrate. The patterned composite layer is heated in an oxygen atmosphere to cause a chemical reaction among the ferroelectric layer producing metal acrylate compounds and oxygen, a patterned ferroelectric layer being formed on the substrate.
Claims3
A method for forming a patterned ferroelectric layer on a substrate, comprising:
- (a) forming a composite layer on a substrate, the composite layer comprising bismuth methacrylate, strontium methacrylate and tantalum dimethacrylate metal acrylate compounds, a photoinitiator compound and an acrylate crosslinking compound;
- (b) placing a photomask onto the composite layer, the photomask having areas that are transparent to ultraviolet light;
- (c) irradiating the composite layer, through the photomask, with ultraviolet light;
- (d) placing a solvent on the irradiated composite layer to remove non-irradiated areas of the composite layer from the substrate, a patterned composite layer being formed on the substrate;
- and
- (e) heating the patterned composite layer in an oxygen atmosphere to cause a chemical reaction among the bismuth methacrylate, strontium methacrylate and tantalum dimethacrylate metal acrylate compounds and oxygen, a patterned ferroelectric layer being formed on the substrate.
A method for forming a patterned ferroelectric layer on a substrate, comprising:
- (a) depositing a solution onto a substrate, the solution comprising bismuth methacrylate, strontium methacrylate and tantalum dimethacrylate metal acrylate compounds, a photoinitiator compound, an acrylate crosslinking compound and a solvent;
- (b) heating the solution and the substrate, to drive solvent from the deposited solution, a composite layer being formed on the substrate;
- (c) placing a photomask onto the composite layer, the photomask having areas that are transparent to ultraviolet light;
- (d) irradiating the composite layer, through the photomask, with ultraviolet light;
- (e) placing a solvent on the irradiated composite layer to remove non-irradiated areas of the composite layer from the substrate, a patterned composite layer being formed on the substrate;
- and
- (f) heating the patterned composite layer in an oxygen atmosphere to cause a chemical reaction among the bismuth methacrylate, strontium methacrylate and tantalum dimethacrylate metal acrylate compounds and oxygen, a patterned ferroelectric layer being formed on the substrate.
A method for forming a patterned ferroelectric layer on a substrate, comprising:
- (a) depositing a solution onto a substrate, the solution comprising bismuth methacrylate, strontium methacrylate, tantalum dimethacrylate, benzildimethylketal, triethylenglycol dimethacrylate, glyceryl tri-2-ethylhexanoate, and methoxyethoxy alcohol;
- (b) heating the solution and the substrate, to drive solvent from the deposited solution, a composite layer being formed on the substrate;
- (c) placing a photomask onto the composite layer, the photomask having areas that are transparent to ultraviolet light;
- (d) irradiating the composite layer, through the photomask, with ultraviolet light;
- (e) placing a solvent on the irradiated composite layer to remove non-irradiated areas of the composite layer from the substrate, a patterned composite layer being formed on the substrate;
- and
- (f) heating the patterned composite layer in an oxygen atmosphere to cause a chemical reaction among the bismuth methacrylate, strontium methacrylate, tantalum dimethacrylate and oxygen, a patterned ferroelectric layer being formed on the substrate.
Dependencies are inferred from the claim text.