Carbon film
AssigneeNational Institute of Advanced Industrial Science and Technology
InventorsYoshinori Koga, Masataka Hasegawa, Sumio Iijima, Kazuo Tsugawa, Masatou Ishihara
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Abstract
Disclosed is a carbon film which has optical characteristics of retaining a high transparency and being high in refractive index and low in double refractivity, is excellent in electric insulating performance, can be applied to various base materials with good adhesiveness, and can be formed at low temperature. Also disclosed is a laminate including a carbon film and a method for producing the laminate.
Claims9
A carbon film, which has an approximate spectrum curve obtainable by superimposing, on a peak fitting curve A at a Bragg's angle (2θ±0.3°) of 43.9°, a peak fitting curve B at 41.7° and a base line in an X-ray diffraction spectrum by CuKa1 ray,
- said fitting curve B having an intensity of from 5 to 90% relative to an intensity of the fitting curve A, said carbon film having a film thickness of from 2 nm to 100 μm,
- said carbon film having a Raman shift having a peak at 1333 cm−1±10 cm−1,
- said peak having a half-value width of from 10 to 40 cm−1 in the Raman scattering spectrum,
- wherein the fitting curve A is a curve of a Pearson VII function, the fitting curve B is a curve of an asymmetric normal distribution function, and the base line is represented by a primary function,
- wherein said carbon film comprises a structure in which a cubic diamond and a hexagonal diamond are mixed and a defect remains at a high concentration in a portion removed by etching, and a peak is observed at 2θ of 43.9°±0.3° in the X-ray diffraction spectrum in the cubic diamond and a peak is observed at 2θ of 41.7°±0.3° in the X-ray diffraction spectrum in the defect,
- wherein the crystal defect comprises hexagonal diamond and a point defect including atomic vacancy, a linear defect including relocation or a defect on the basis of a surface unit including a lamination defect, and
- wherein the defect is formed in a portion formed by removing a graphite or amorphous carbonaceous substance deposited in the course of the film formation by etching.
A laminate comprising:
- a substrate;
- and a carbon aggregate film having a thickness of 2 nm to 100 μm which is disposed on the substrate, said carbon aggregate film comprising an aggregate of carbon particles having an approximate spectrum curve obtainable by superimposing, on a peak fitting curve A at a Bragg's angle (2θ±0.3°) of 43.9°, a peak fitting curve B at 41.7° and a base line in an X-ray diffraction spectrum by CuKa1 ray,
- said fitting curve B having an intensity of from 5 to 90% relative to an intensity of the fitting curve A, said carbon particles having a Raman shift having a peak at 1333±10 cm−1,
- said peak having a half-value width of from 10 to 40 cm−1 in the Raman scattering spectrum, said carbon particles being aggregated on the substrate to give a surface density of from 1×1010 cm−2 to 4×1013 cm−2,
- wherein the fitting curve A is a curve of a Pearson VII function, the fitting curve B is a curve of an asymmetric normal distribution curve, and the base line is represented by a primary function,
- wherein said carbon film comprises a structure in which a cubic diamond and a hexagonal diamond are mixed and a defect remains at a high concentration in a portion removed by etching, and a peak is observed at 2θ of 43.9°±0.3° in the X-ray diffraction spectrum in the cubic diamond and a peak is observed at 2θ of 41.7°±0.3° in the X-ray diffraction spectrum in the defect,
- wherein the crystal defect comprises hexagonal diamond and a point defect including atomic vacancy, a linear defect including relocation or a defect on the basis of a surface unit including a lamination defect, and
- wherein the defect is formed in a portion formed by removing a graphite or amorphous carbonaceous substance deposited in the course of the film formation by etching.
Dependencies are inferred from the claim text.