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US 8,007,875 B2Granted
Method of forming a carbon nano-tube
AssigneeSamsung Electronics Co., Ltd.
InventorsHong-Sik Yoon, Young-Moon Choi, Sun-Woo Lee
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Abstract
In a method of forming carbon nano-tubes, a catalytic film is formed on a substrate. The catalytic film is then transformed into preliminary catalytic particles. Thereafter, the preliminary catalytic particles are transformed into catalytic particles. Carbon nano-tubes then grow from the catalytic particles. The carbon nano-tubes have relatively high conductivity and high number density.
Claims20
A method of forming carbon nano-tubes, the method comprising:
- forming a catalytic film on a substrate;
- transforming the catalytic film into preliminary catalytic particles using a source gas and a carrier gas without a plasma;
- transforming the preliminary catalytic particles into catalytic particles using a source gas, a carrier gas, and a plasma, to increase a carbon content to near saturation and without growing carbon nanotubes;
- and
- growing carbon nano-tubes from the catalytic particle using a source gas and a carrier gas at a greater temperature than the transforming of the preliminary catalytic particles,
- wherein the transforming of the catalytic film, the transforming of the preliminary catalytic particles and the growing of the carbon nanotubes are each performed using a different combination of process parameter setpoints.
3 more elements
A method of forming carbon nano-tubes, the method comprising:
- placing a substrate in a chamber;
- forming a catalytic film on the substrate;
- introducing a source gas and a carrier gas into the chamber and establishing first process parameters, thereby transforming the catalytic film into preliminary catalytic particles without a plasma, the source gas being different from the carrier gas;
- establishing second process parameters, thereby transforming the preliminary catalytic particles into catalytic particles with a plasma to increase a carbon content to near saturation and without growing carbon nanotubes;
- and
- establishing third process parameters, thereby growing carbon nano-tubes on the catalytic particles at a greater temperature than the establishing of the second process parameters,
- wherein a combination of process parameter setpoints of each of the first through third process parameters are different from each other.
4 more elements
Dependencies are inferred from the claim text.