Insert molded actuator components

A method of injection molding a stator component for an electrostatically actuated valve comprising:

• disposing a planar conductive assembly within an injection mold, the planar conductive assembly comprising:
• a support layer comprising a first polymer;
• a conductive layer comprising a first side and a second side, the first side coupled to the support layer, the conductive layer having a thickness of between about 50 angstroms and 500 angstroms;
• and
• a dielectric layer comprising a second polymer, the dielectric layer covering the second side of the conductive layer the dielectric layer having a surface roughness (Rq) of between about 100 angstroms and 1000 angstroms;
• and
• injecting a third polymer into the injection mold to produce a stator component.

A method of forming a component of an electrostatically actuated device comprising:

• extruding a first polymer to form a support layer;
• disposing a conductive material on the support layer to form a conductive layer extending continuously over the support layer;
• disposing a dielectric material on the conductive layer to form a dielectric layer having a surface roughness (Rq) of between about 100 angstroms and 1000 angstroms;
• placing the support layer, the conductive layer, and the dielectric layer within an injection mold defining a cavity, with the support layer facing the interior of the cavity;
• filling the cavity with a second polymer to form the component of the electrostatically actuated device;
• and
• removing the component of the electrostatically actuated device from the injection mold;
• wherein the finished component includes the dielectric layer attached to the conductive layer on a first side, and exposed to atmosphere on an opposing side.