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US 8,007,617 B2Granted
Method of transferring carbon nanotubes
AssigneeSamsung Electronics Co., Ltd.
InventorsYo-seb Min, Un-jeong Kim, Eun-ju Bae, Eun-hong Lee
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Abstract
Provided is a method of transferring carbon nanotubes formed on a donor substrate to an acceptor substrate which may include vertically forming carbon nanotubes on a first substrate, providing a second substrate, aligning the first substrate with the second substrate so that the carbon nanotubes face the second substrate, and transferring the carbon nanotubes onto the second substrate by pressing the first substrate onto the second substrate.
Claims16
A method of transferring carbon nanotubes comprising:
- vertically forming carbon nanotubes on a first substrate;
- providing a second substrate;
- aligning the first substrate with the second substrate so that the carbon nanotubes face the second substrate;
- and
- transferring the carbon nanotubes onto the second substrate by pressing the first substrate onto the second substrate and pushing the first substrate in a direction perpendicular to a direction in which the first substrate is pressed onto the second substrate to arrange the carbon nanotubes in a direction parallel to a surface of the second substrate on which the nanotubes are transferred, wherein transferring the carbon nanotubes comprises transferring the carbon nanotubes onto the second substrate to be attached in a horizontal direction with respect to the second substrate.
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A method of transferring carbon nanotubes comprising:
- vertically forming carbon nanotubes on a first substrate;
- providing a second substrate;
- aligning the first substrate with the second substrate so that the carbon nanotubes face the second substrate;
- and
- transferring the carbon nanotubes onto the second substrate by pressing the first substrate onto the second substrate, wherein
- transferring the carbon nanotubes comprises transferring the carbon nanotubes onto the second substrate to be attached in a horizontal direction with respect to the second substrate,
- forming the carbon nanotubes comprises forming a catalyst layer on the first substrate, patterning the catalyst layer, and vertically forming the carbon nanotubes with respect to the first substrate on the catalyst layer,
- forming the carbon nanotubes is performed using methane gas and water as raw materials at a temperature of about 300 to about 600° C. under a pressure of 1 Torr or less using a water plasma enhanced chemical vapor deposition method.
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Dependencies are inferred from the claim text.