Substrate holder having a fluid gap and method of fabricating the substrate holder
AssigneeTokyo Electron Limited
InventorThomas Hamelin
Life of this patent
Estimating the term…
Abstract
A substrate holder (20) for supporting a substrate (30). A heating component (50) is positioned adjacent to a supporting surface and between the supporting surface and a cooling component (60). A fluid gap is positioned between the cooling component and the heating component, the fluid gap configured to receive a fluid to increase thermal conduction between the cooling component and the heating component. A brazing material is disposed between the cooling component and the heating component, the brazing material disposed adjacent to the fluid gap.
Claims36
A substrate holder for supporting a substrate, comprising:
- a supporting surface;
- a cooling component having a plurality of cooling channels configured to receive a cooling fluid;
- a heating component positioned adjacent to the supporting surface and between the supporting surface and the cooling component;
- a fluid gap positioned between the cooling component and the heating component such that the fluid gap is interposed between the plurality of cooling channels of the cooling component and heating component, the fluid gap configured to receive a fluid to vary the thermal conductance between the cooling component and the heating component;
- a brazing material disposed at least along a peripheral region between the cooling component and the heating component such that the brazing material is disposed adjacent to the fluid gap and in direct contact with each of the heating component and cooling component and seals an enclosure which forms the fluid gap;
- and
- wherein the fluid gap comprises a least one groove configured to prevent flow of the brazing material into the fluid gap.
A substrate holder for supporting a substrate, comprising:
- a supporting surface;
- a cooling component having a plurality of cooling channels configured to receive a cooling fluid;
- a heating component positioned adjacent to the supporting surface and between the supporting surface and the cooling component;
- a fluid gap positioned between the cooling component and the heating component such that the fluid gap is interposed between the plurality of cooling channels of the cooling component and heating component, the fluid gap configured to receive a fluid to vary the thermal conductance between the cooling component and the heating component;
- a brazing material disposed at least along a peripheral region between the cooling component and the heating component such that the brazing material is disposed adjacent to the fluid gap and in direct contact with each of the heating component and cooling component and seals an enclosure which forms the fluid gap;
- and a groove means for preventing flow of the brazing material into the fluid gap.
A substrate holder for supporting a substrate, comprising:
- a supporting surface;
- means for cooling the supporting surface;
- means for heating the supporting surface positioned adjacent to the supporting surface and between the supporting surface and the means for cooling;
- means for receiving a fluid to vary thermal conductance between the means for cooling and the means for heating, the means for receiving a fluid being positioned between the means for cooling and the means for heating;
- a brazing material disposed at least along a peripheral region between the means for cooling and the means for heating such that the brazing material is in direct contact with each of the means for heating and means for cooling and seals an enclosure which forms the means for receiving a fluid;
- and a groove in at least one of the means for heating and the means for cooling, the groove being configured to prevent flow of the brazing material into the means for receiving a fluid.
Dependencies are inferred from the claim text.