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US 8,007,589 B2Granted
Apparatus and method for compounding carbon nanotubes
AssigneeSemes Co., Ltd.
InventorsHo-Soo Hwang, Sung-Soo Kim, Suk-Min Choi, Jin-Tae Hwang, Suk-Won Jang, Hyung-Suk Kim, Byung-Yun Kong
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Abstract
Apparatus and method for compounding carbon nanotubes are provided to uniformly supply a source gas used to compound carbon nanotubes, efficiently exhaust the source gas, and increase a retrieve rate of the carbon nanotubes. According to the apparatus and method, carbon nanotubes are massively compounded.
Claims11
An apparatus for compounding carbon nanotubes, comprising:
- a reaction tube configured to define a production space in which carbon nanotubes are produced;
- a heating unit configured to heat the reaction tube;
- a boat, disposed in the production space during a process, on which composite substrates are loaded;
- and
- a gas supply part with a nozzle unit in the reaction tube configured to supply a source gas to the production space, the nozzle unit including injection parts, the ends of the injection parts being upwardly bent so as to be inclined with respect to a centerline of the reaction tube and being further configured to supply the source gas into the production space in a direction inclined from the centerline of the reaction tube, wherein
- the injection parts comprises a first injection part configured to supply a source gas at a higher position than the boat and a second injection part configured to supply a source gas at a lower position than the first injection part, and
- the boat includes multiple stages and multiple columns configured to support multiple composite substrates, the boat including multiple fence structures formed along the edges of respective composite substrates, each fence including a first sidewall arranged perpendicular to a source gas flow and having a first height, at least one second side wall arranged parallel to the source gas flow and having a second height, and a third sidewall arranged perpendicular to the source gas flow and having a third height higher than the first height and the second height.
4 more elements
Dependencies are inferred from the claim text.