Sensor
AssigneeRobert Bosch GmbH
InventorsBernhard Opitz, Ando Feyh, Daniel Herrmann, Oliver Wolst
Life of this patent
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Abstract
A sensor, in particular a thermal sensor and/or gas sensor, encompassing an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion, wherein the temperature-dependent electrical property is a resistance or an impedance. Thermal and electrical decoupling of the active structure from the substrate is accomplished by way of porous silicon and/or a cavity manufactured by electropolishing.
Claims14
A sensor, comprising:
- an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion;
- a heating element, the sensor component and the heating element being situated in a common n-type well;
- and
- an electrical coupling barrier between the sensor component and the heating element in the common n-type well;
- wherein the temperature-dependent electrical property is a resistance or an impedance;
- and
- wherein each of the sensor component and the heating element is a diode.
A method for manufacturing a sensor, the sensor including an electrical sensor component having an electrical property whose value changes in temperature-dependent fashion, a heating element, wherein each of the sensor component and the heating element is a diode, the sensor component and the heating element being situated in a common n-type well, and an electrical coupling barrier situated between the sensor component and the heating element in the common n-type well, the method comprising:
- forming the electrical sensor component;
- and
- after the forming of the electrical sensor component, forming an insulation element that thermally insulates at least the sensor component.
Dependencies are inferred from the claim text.