Back to results
US 8,007,080 B2Granted
Actuator device, method of manufacturing the same and liquid-jet head
AssigneeSeiko Epson Corporation
InventorXin-Shan Li
Life of this patent
Estimating the term…
Abstract
Provided is an actuator device including a piezoelectric element formed of a lower electrode, a piezoelectric layer, and an upper electrode, and displaceably provided on a substrate with a zirconium oxide layer interposed therebetween, the substrate having a silicon oxide layer formed by thermal oxidation on at least a surface, and an intermediate layer made of at least one material selected from the group consisting of titanium oxide, hafnium oxide, aluminum oxide, calcium oxide, and rare earth oxide, and provided between the silicon oxide layer and the zirconium oxide layer.
Claims8
An actuator device comprising:
- a piezoelectric element formed of a lower electrode, a piezoelectric layer, and an upper electrode, and displaceably provided on a substrate with a zirconium oxide layer interposed therebetween, the substrate including a silicon oxide layer formed by thermal oxidation on at least a surface thereof;
- and
- an intermediate layer made of at least one material selected from the group consisting of titanium oxide, hafnium oxide, aluminum oxide, calcium oxide, and rare earth oxide, and provided between the silicon oxide layer and the zirconium oxide layer.
Dependencies are inferred from the claim text.