Microfluidic device and a fluid ejection device incorporating the same
AssigneeHewlett-Packard Development Company, L.P.
InventorsCharles C Haluzak, Chien-Hua Chen, Kirby Sand
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Abstract
A microfluidic device includes first and second substrates bonded together. The first substrate has first and second opposed surfaces. A die pocket is formed in the first opposed surface, and a through slot extends from the die pocket to the second opposed surface. The second substrate is bonded to the second opposed surface of the first substrate whereby an outlet of a channel formed in the second substrate substantially aligns with the through slot. The channel of the second substrate has an inlet that is larger than the outlet.
Claims20
A microfluidic device, comprising:
- a first substrate having first and second opposed surfaces, the first substrate having a die pocket formed in the first opposed surface, and a through slot extending from the die pocket to the second opposed surface;
- and
- a second substrate bonded to the second opposed surface of the first substrate whereby an outlet of a channel formed in the second substrate substantially aligns with the through slot, wherein the channel has an inlet that is larger than the outlet.
A method of making a microfluidic device, the method comprising:
- forming a die pocket and a through slot in a first substrate, wherein the through slot extends from the die pocket to a surface of the first substrate;
- forming a channel having an inlet and an outlet in a second substrate, wherein the inlet is larger than the outlet;
- and
- bonding the first and second substrates whereby the outlet substantially aligns with the through slot.
A microfluidic device, comprising:
- a first substrate having first and second opposed surfaces, the first substrate being configured to receive a die on the first opposed surface, and having a through slot extending from the first opposed surface to the second opposed surface;
- and
- a second substrate bonded to the second opposed surface of the first substrate whereby an outlet of a channel formed in the second substrate substantially aligns with the through slot, wherein the channel has an inlet that is larger than the outlet.
Dependencies are inferred from the claim text.