Apparatus support
AssigneeVistec Lithography Inc.
InventorPaul George Harris
Life of this patent
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Abstract
An apparatus support (11) with a damping characteristic comprises a rigid reinforcing component, in particular a steel plate (19), encapsulated by a body (16) of compliant material, particularly a composite of particulate mineral material and synthetic binder. The plate (19) defines an opening (19a) at spacing from the upper side of the body (16) and a mounting ring (21) is embedded in the body so as to be disposed at least partly above the opening. The ring (21) has a peripheral flange (21a) which is spaced from the plate (19) and from the upper side of the body and overlaps the plate in vertical projection. Material of the body is thus disposed above the flange (21a) and also sandwiched between the flange and the plate so that a damping zone is present around the ring both above and below the flange.
Claims17
An apparatus support with a damping characteristic, comprising a rigid reinforcing component encapsulated by a body of compliant material, the component defining an opening at a spacing from an intended upper side of the body, and a mount for apparatus, the mount being embedded in the body to be disposed at least partly above the opening and having a flange which is spaced from the component and from the upper side of the body and overlaps the component in vertical projection thereof so that material of the body is disposed above the flange and is sandwiched between the flange and the component to provide a damping zone around the mount both above and below the flange.
An apparatus support with a damping characteristic for supporting an apparatus which, when combined with the support comprise an equipment, comprising a rigid reinforcing component encapsulated by a body of compliant material, the component defining an opening at a spacing from an intended upper side of the body, and a mount mounting the apparatus, the mount being embedded in the body to be disposed at least partly above the opening and having a flange which is spaced from the component and from the upper side of the body and overlaps the component in vertical projection thereof so that material of the body is disposed above the flange and is sandwiched between the flange and the component to provide a damping zone around the mount both above and below the flange.
Dependencies are inferred from the claim text.