Scribe line forming mechanism, scribe head, and scribe device
AssigneeMitsuboshi Diamond Industrial Co., Ltd.
InventorYoshitaka Nishio
Life of this patent
Estimating the term…
Loading patent…
AssigneeMitsuboshi Diamond Industrial Co., Ltd.
InventorYoshitaka Nishio
Estimating the term…
A scribing line forming mechanism according to the present invention includes: a scribing line forming means (207) being structured so as to form a scribing line on a substrate by contacting the substrate; and a supporting means for supporting the scribing line forming means such that the scribing line forming means is turnable about a first turning axis (204), the supporting means being structured so as to be turnable about a second turning axis (202), the second turning axis being different from the first turning axis, wherein the axial center of the first turning axis and the axial center of the second turning axis are approximately in parallel, and the axial center of the second turning axis is distant by a predetermined interval from a portion where the substrate and the scribing line forming means contact each other.
A scribing apparatus comprising:
Dependencies are inferred from the claim text.