Pressure sensor grid
AssigneeHewlett-Packard Development Company, L.P.
InventorsWel Wu, Shih-Yuan (S Y) Wang, Pratik Chaturvedi, Sagl Varghese Mathal
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Abstract
A pressure sensor grid can comprise a plurality of bottom wires, arranged substantially parallel to each other and overlaid by a plurality of top wires arranged substantially perpendicular to the bottom wires. Each intersection of the top and bottom wires includes a pressure sensor. The sensor comprises a switching junction situated between the bottom wire and the top wire and a conducting channel extending through the switching junction from the bottom wire to the top wire. Pressure applied to the top wire causes an increase in conductance between the bottom wire and the top wire.
Claims20
A pressure sensor grid, comprising:
- a plurality of bottom wires, arranged substantially parallel to each other;
- a plurality of top wires arranged substantially perpendicular to the bottom wires and overlaying the bottom wires at a plurality of intersections, and
- a pressure sensor at each intersection, comprising a switching junction situated between the bottom wire and the top wire;
- and a conducting channel having an origin adjacent to the bottom wire and extending through the switching junction, wherein pressure applied to the top wire causes an increase in conductance between the bottom wire and the top wire.
A method of fabricating a pressure sensor, comprising:
- depositing a first electrode onto a substrate;
- depositing a switching junction onto the first electrode;
- depositing a second electrode onto the switching junction;
- placing dopants in the switching junction;
- and
- forming a conducting channel through the switching junction, wherein the conducting channel has a channel end.
A method of detecting pressure, comprising:
- providing a pressure sensor, comprising:
- a first electrode;
- a second electrode;
- a switching junction situated between the first electrode and the second electrode, wherein the switching junction includes dopants;
- and
- a conducting channel having an origin adjacent to the first electrode and extending through the switching junction, and having a channel end, wherein a pressure applied to the second electrode causes an increase in a conductance between the first electrode and the second electrode;
- applying a pressure to the second electrode;
- and
- detecting the increase in conductance between the first electrode and the second electrode through a conductance sensor operably connected to the pressure sensor.
Dependencies are inferred from the claim text.