Shape measuring apparatus and shape measuring method
AssigneePanasonic Corporation
InventorsKeiichi Yoshizumi, Masateru Doi, Takayuki Kurata
Life of this patent
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Abstract
A moving vector calculation unit calculates a moving vector M representing a quantity and a direction of movement of a probe on basis of a stylus displacement vector, a stylus displacement vector D, and a direction change angle θ of the stylus displacement vector D that is caused by a frictional force between a stylus 32 and the measuring surface 5a during scanning of the measuring surface 5a by the stylus 32. The stylus displacement vector D is a vector including a quantity and a direction of position displacement of the stylus 32 relative to the probe 5. Movement of an XY-stage 7 is controlled so that the probe 6 moves in accordance with the moving vector M.
Claims18
A shape measuring apparatus, comprising:
- a probe for supporting a stylus so that the stylus can be displaced by a measuring force from a measuring surface;
- a moving unit for moving a relative position between the probe and the measuring surface so that the stylus scans the measuring surface;
- a stylus displacement vector detection unit for detecting a stylus displacement vector representing a quantity and a direction of position displacement of the stylus relative to the probe;
- a moving vector calculation unit for calculating a moving vector representing a quantity and a direction of movement of the probe during scanning of the measuring surface by the stylus on basis of the stylus displacement vector and a direction change angle of the stylus displacement vector caused by a frictional force between the stylus and the measuring surface;
- and
- a movement control unit for controlling the moving unit so that the probe moves in accordance with the moving vector.
A shape measuring method comprising:
- moving a relative position between a probe and a measuring surface so that a stylus scans the measuring surface, the stylus being supported so as to be capable of displacing relative to the prove by a measuring force from the measuring surface;
- calculating a stylus displacement vector representing a quantity and a direction of position displacement of the stylus relative to the probe;
- calculating a moving vector representing a quantity and a direction of movement of the probe during scanning of the measuring surface by the stylus on basis of the stylus displacement vector and a direction change angle of the stylus displacement vector caused by a frictional force between the stylus and the measuring surface;
- and
- moving the relative position so that the probe moves in accordance with the moving vector.
Dependencies are inferred from the claim text.