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US 8,006,356 B2Granted
Method of forming an array of drop generators
AssigneeXerox Corporation
InventorsJohn R. Andrews, Terrance L. Stephens
Life of this patent
Estimating the term…
Abstract
A method for making an electromechanical device including forming an electromechanical transducer that includes a deposited metallic diaphragm, and attaching the electromechanical transducer to a fluid channel substructure.
Claims16
A method of making a plurality of electromechanical transducers, comprising:
- forming an array of piezo elements on a rigid carrier substrate, wherein the piezo elements are formed from a laminar structure of layered conductive and piezoelectric material, a first side of the laminar structure mechanically attached to the rigid carrier substrate by means of a removable double-sided tape;
- planarizing the array of the piezo elements by filling regions between each of the piezo elements with a polymer;
- attaching a second, opposite side of the planarized array to a fluid channel substructure;
- and
- removing the rigid carrier substrate and the double-sided tape from the laminar structure.
2 more elements
A method of making a plurality of electromechanical transducers, comprising:
- mechanically attaching a laminar structure to a rigid carrier substrate using a double-sided tape;
- forming an array of piezo elements by dicing the laminar structure comprising a conductive layer and a piezoelectric layer to produce a plurality of individual piezoelectric transducers;
- planarizing the diced laminar structure;
- and
- depositing a metal layer on the array of piezo elements to form piezoelectric transducers;
- and
- attaching the piezoelectric transducers to a fluid channel substructure;
- and,
- removing the rigid carrier substrate and the double-sided tale from the laminar structure.
6 more elements
Dependencies are inferred from the claim text.