Manufacturing method of vacuum airtight container
AssigneeCanon Kabushiki Kaisha
InventorsTokutaka Miura, Mitsutoshi Hasegawa, Yoichi Ando
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AssigneeCanon Kabushiki Kaisha
InventorsTokutaka Miura, Mitsutoshi Hasegawa, Yoichi Ando
Estimating the term…
A manufacturing method of a vacuum airtight container includes a baking step of baking, in a vacuum atmosphere, a container in which a first non-evaporable getter and a second non-evaporable getter having an activation temperature higher than that of the first non-evaporable getter are disposed. The baking step further includes steps of baking the entire container by increasing the temperatures of the container to a temperature T1 and holding the temperature T1, which is equal to or higher than an activation temperature of the first non-evaporable getter and is lower than an activation temperature of the second non-evaporable getter. After holding the temperature T1, the entire container is baked by increasing the temperature of the container to a temperature T2, which is higher than the activation temperature of the second non-evaporable getter.
A manufacturing method of a vacuum airtight container, the method comprising:
A method of manufacturing a vacuum airtight container, comprising:
Dependencies are inferred from the claim text.