Flow measurement and control with bubble detection
AssigneeBrooks Instrument, LLC
InventorsHao Duan, Aaron S. Tint, Christophe Ellec
Life of this patent
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AssigneeBrooks Instrument, LLC
InventorsHao Duan, Aaron S. Tint, Christophe Ellec
Estimating the term…
Systems and methods for liquid flow sensing and control for use with a variety of different types of liquid flow measurement and control systems. The liquid flow sensor system senses a flow signal indicative of the flow rate of the liquid flowing in a sensor conduit and analyzes the flow signal to determine, by detecting characteristic changes in the signal, whether a bubble is present in the sensor conduit. Where the system determines that a bubble is present, it may generate an alarm signal indicative of the presence of the bubble. A flow control system incorporating the flow sensor as a feedback source may respond to the detection of a bubble by temporarily freezing the flow control parameters until the bubble has exited the sensor conduit. The flow control system can implement procedures for clearing a bubble from the sensor conduit where the system detects that the bubble has become stuck.
A method of measuring a flow rate of a liquid flowing in a liquid flow sensor, the liquid flow sensor including a sensor conduit and the liquid including a plurality of bubbles formed therein, the method comprising acts of:
A method of controlling the flow rate of a liquid through a flow conduit coupled to a controllable valve and a liquid flow sensor, liquid flow sensor including a sensor conduit and the liquid including a plurality of bubbles formed therein, the method comprising acts of
A system for measuring a flow rate of a liquid flowing in a flow conduit, the liquid including a plurality of bubbles formed therein, the system comprising:
A method of measuring a flow rate of a liquid flowing in a liquid flow sensor, the liquid flow sensor including a sensor conduit and the liquid including a plurality of bubbles formed therein, the method comprising acts of:
A system for measuring a flow rate of a liquid flowing in a flow conduit, the liquid including a plurality of bubbles formed therein, the system comprising:
Dependencies are inferred from the claim text.