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US 7,990,539 B2Granted
Sensor and method utilizing multiple optical interferometers
OwnerChian Chiu Liinventor
Life of this patent
Estimating the term…
Abstract
Disclosed is a low-cost high-resolution compact accelerometer which utilizes multiple self-mixing optical interferometers. The device is also a micro-opto-electro-mechanical systems (MOEMS) sensor. The interferometers are used to detect acceleration as well as monitor the wavelength, temperature, and refractive index and perform differential measurements. In addition, photodetectors are employed to monitor the input optical power.
Claims20
A method for performing measurements, comprising:
- 1) dividing an optical beam into at least a plurality of first beam portions and a plurality of second beam portions by wavefront division using a plurality of phase means, said method arranged such that said phase means influence said first and second beam portions only once;
- 2) phase shifting said first and second beam portions using said phase means respectively;
- 3) generating optical interference among said first beam portions and among said second beam portions in separate places respectively;
- 4) receiving a plurality of signals of said interference respectively;
- 5) sensing optical power of said optical beam;
- and
- 6) determining value of physical information using said signals and said optical power, said method arranged such that said value influences at least one of said signals.
4 more elements
A sensing apparatus comprising:
- 1) a plurality of side-by-side first regions for transmitting a plurality of beam portions and producing phase shift on said beam portions respectively, said first regions having a transmissive medium respectively;
- 2) said apparatus arranged such that said first regions influence said beam portions only once and at least one of said first regions is movable, said at least one of said first regions arranged to move separately relative to another of said first regions, positional status of said at least one of said first regions influencing said phase shift of one of said beam portions;
- 3) said apparatus arranged such that said beam portions are disposed side by side along a direction in a second region after exiting said first regions, the beam width of one of said beam portions along said direction in said second region is around or smaller than the wavelength of said beam portions, said beam portions arranged to propagate, mix together by self-mixing effect, and interfere with each other substantially in a third region for generating at least one resulting beam within a substantially short distance, said second region arranged adjacent to said first regions, said third region arranged adjacent to said second region;
- and
- 4) usage means for receiving said resulting beam within a substantially short distance.
2 more elements
A sensing apparatus comprising:
- 1) a first detector for sensing the power of an optical beam;
- 2) a first self-mixing interferometer comprising a structure for splitting said optical beam into a plurality of beam portions by wavefront division and generating interference among said beam portions;
- and
- 3) a second detector for sensing interference signal of said interference;
- 4) said first detector and said structure arranged to be substantially proximate.
2 more elements
A sensing apparatus comprising:
- 1) a movable mass, said mass created by micromachining or semiconductor technologies or other technologies of making microscale or nanoscale structures;
- and
- 2) a detector having a first region for sensing the power of an optical beam, said apparatus arranged such that said optical beam impinges on said mass and at least a portion of said optical beam is transmitted to said first region by passing through a second region of said mass;
- 3) said apparatus arranged such that said first region and a part of said mass are in substantially close proximity and said mass and said detector are arranged to be integrated.
1 more element
Dependencies are inferred from the claim text.