Detecting and repairing defects of photovoltaic devices
AssigneeKLA-Tencor Corporation
InventorsGuoheng Zhao, George H. Zapalac, Jr., Samuel S. H. Ngai, Ady Levy, Mehdi Vaez-Iravani
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AssigneeKLA-Tencor Corporation
InventorsGuoheng Zhao, George H. Zapalac, Jr., Samuel S. H. Ngai, Ady Levy, Mehdi Vaez-Iravani
Estimating the term…
An apparatus for both detecting and repairing a shunt defect in a solar cell substrate. A shunt detection module detects the shunt defect in the substrate, using at least one of lock-in thermography and current-voltage testing. A process diagnostic module determines whether the substrate should be passed without further processing by the apparatus, rejected without further processing by the apparatus, or repaired by the apparatus. A shunt repair module electrically isolates the shunt defect in the substrate. In this manner, a single apparatus can quickly check for shunts and make a determination as to whether the substrate is worth repairing. If it is worth repairing, then the apparatus can make the repairs to the substrate.
An apparatus for both detecting and repairing a shunt defect in a solar cell substrate, the apparatus comprising:
A method for repairing a shunt defect in a solar cell substrate, the method comprising the steps of:
Dependencies are inferred from the claim text.