TiO2-containing silica glass
AssigneeAsahi Glass Company, Limited
InventorsAkio Koike, Yasutomi Iwahashi, Shinya Kikugawa
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Abstract
The present invention is to provide a TiO2—SiO2 glass having suitable thermal expansion properties as an optical member of an exposure tool for EUVL. The present invention relates to a TiO2-containing silica glass having a temperature, at which a coefficient of thermal expansion is 0 ppb/° C., falling within the range of 23±4° C. and a temperature width, in which a coefficient of thermal expansion is 0±5 ppb/° C., of 5° C. or more.
Claims11
A TiO2-containing silica glass having a temperature, at which a coefficient of thermal expansion is 0 ppb/° C., falling within a range of 23±4° C., a temperature width, in which a coefficient of thermal expansion is 0±5 ppb/° C., of 5° C. or more, and an OH concentration of 100 ppm or more.
A TiO2-containing silica glass having a temperature, at which a coefficient of thermal expansion is 0 ppb/° C., falling within a range of 23±4° C., a temperature width, in which a coefficient of thermal expansion is 0±5 ppb/° C., of 5° C. or more, a fictive temperature of not higher than 850° C., and an F concentration of 1,000 ppm or more.
Dependencies are inferred from the claim text.