Vessel, coating, inspection and processing apparatus

A syringe or syringe parts comprising:

• a barrel and a piston, the barrel having an inner surface and the piston having a side surface engaging the barrel inner surface, wherein at least one of the inner surface and the side surface is a substrate coated with a lubricity layer configured to provide a lower piston sliding force or breakout force than the uncoated substrate
• the lubricity layer having one of the following atomic ratios, measured by X-ray photoelectron spectroscopy (XPS), SiwOxCy or SiwNxCy, where w is 1, x in this formula is from about 0.5 to 2.4, and y is from about 0.6 to about 3;
• the lubricity layer having a thickness by transmission electron microscopy (TEM) between 10 and 500 nm;
• the lubricity layer deposited by plasma enhanced chemical vapor deposition (PECVD) under conditions effective to form a coating from a precursor selected from a linear siloxane, a monocyclic siloxane, a polycyclic siloxane, a polysilsesquioxane, a linear silazane, a monocyclic silazane, a polycyclic silazane, a polysilsesquiazane, a silatrane, a silquasilatrane, a silproatrane, an azasilatrane, an azasilquasiatrane, an azasilproatrane, or a combination of any two or more of these precursors.